Design and performance of a step and repeat imprinting machine

Ian McMackin; Philip Schumaker; Daniel Babbs; Jin Choi; Wenli Collison; S. V. Sreenivasan; Norman E. Schumaker; Michael P. C. Watts; Ronald D. Voisin

doi:10.1117/12.490133

16 June 2003 Design and performance of a step and repeat imprinting machine

Ian McMackin, Philip Schumaker, Daniel Babbs, Jin Choi, Wenli Collison, S. V. Sreenivasan, Norman E. Schumaker, Michael P. C. Watts, Ronald D. Voisin

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.490133
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Molecular Imprints, Inc. (MII) has developed the ImprioTM 100, which is the first commercial step and repeat imprint lithography system with field-to-field alignment. This system is designed to implement the UV curable nano-replication capability of the Step and FlashTM Imprint Lithography (S-FILTM) process. To-date, the Imprio 100 system has demonstrated: 1) Full 200 mm wafer coverage with lithographically useful patterning; 2) Full wafer residual thickness control to enable practical etching (thickness variation < 50 nm, 3 sigma); 3) Field edge control compatible with 50 um kerf regions. 4) Multi-day CD uniformity measured on an analytical SEM < 2 nm, 3 sigma with no process adjustments; 5) Etch pattern transfer including break-through etch of residual material, followed by a bi-layer etch through thick planarization layers; 6) Initial level-to-level alignment target acquisition with accuracy of better than 100 nm. 7) Low air borne particle counts in tool microenvironment consistent with Class 0.1 while imprinting.

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Ian McMackin, Philip Schumaker, Daniel Babbs, Jin Choi, Wenli Collison, S. V. Sreenivasan, Norman E. Schumaker, Michael P. C. Watts, and Ronald D. Voisin "Design and performance of a step and repeat imprinting machine", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.490133

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