Use of tin as a plasma source material for high conversion efficiency

Toshihisa Tomie; Tatsuya Aota; Yoshifumi Ueno; Gohta Niimi; Hidehiko Yashiro; Jingqian Lin; Isao Matsushima; Kazumasa Komiyama; Dong-Hoon Lee; Kentaro Nishigori; Hiroshi Yokota

doi:10.1117/12.483751

16 June 2003 Use of tin as a plasma source material for high conversion efficiency

Toshihisa Tomie, Tatsuya Aota, Yoshifumi Ueno, Gohta Niimi, Hidehiko Yashiro, Jingqian Lin, Isao Matsushima, Kazumasa Komiyama, Dong-Hoon Lee, Kentaro Nishigori, Hiroshi Yokota

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.483751
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Debris-free generation of a tin plasma was demonstrated in the cavity-confined configuration. Narrow band emission at 13.7-nm was observed in an emission spectrum of a cavity confined tin plasma. The spectral efficiency was as high as 12% and we found the conversion efficiency could reach 6%/2π str ultimately while lots of works are required to achieve this value. We also confirmed a magnetic field has some effect of stopping a plasma.

Citation Download Citation

Toshihisa Tomie, Tatsuya Aota, Yoshifumi Ueno, Gohta Niimi, Hidehiko Yashiro, Jingqian Lin, Isao Matsushima, Kazumasa Komiyama, Dong-Hoon Lee, Kentaro Nishigori, and Hiroshi Yokota "Use of tin as a plasma source material for high conversion efficiency", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.483751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available