Implementation and benefits of advanced process control for lithography CD and overlay

Lena Zavyalova; Chong-Cheng Fu; Gary Stanley Seligman; Perry A. Tapp; Victor Pol

doi:10.1117/12.483665

2 June 2003 Implementation and benefits of advanced process control for lithography CD and overlay

Lena Zavyalova, Chong-Cheng Fu, Gary Stanley Seligman, Perry A. Tapp, Victor Pol

Proceedings Volume 5038, Metrology, Inspection, and Process Control for Microlithography XVII; (2003) https://doi.org/10.1117/12.483665
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Due to the rapidly reduced imaging process windows and increasingly stingent device overlay requirements, sub-130 nm lithography processes are more severely impacted than ever by systamic fault. Limits on critical dimensions (CD) and overlay capability further challenge the operational effectiveness of a mix-and-match environment using multiple lithography tools, as such mode additionally consumes the available error budgets. Therefore, a focus on advanced process control (APC) methodologies is key to gaining control in the lithographic modules for critical device levels, which in turn translates to accelerated yield learning, achieving time-to-market lead, and ultimately a higher return on investment. This paper describes the implementation and unique challenges of a closed-loop CD and overlay control solution in high voume manufacturing of leading edge devices. A particular emphasis has been placed on developing a flexible APC application capable of managing a wide range of control aspects such as process and tool drifts, single and multiple lot excursions, referential overlay control, 'special lot' handling, advanced model hierarchy, and automatic model seeding. Specific integration cases, including the multiple-reticle complementary phase shift lithography process, are discussed. A continuous improvement in the overlay and CD Cpk performance as well as the rework rate has been observed through the implementation of this system, and the results are studied.

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Lena Zavyalova, Chong-Cheng Fu, Gary Stanley Seligman, Perry A. Tapp, and Victor Pol "Implementation and benefits of advanced process control for lithography CD and overlay", Proc. SPIE 5038, Metrology, Inspection, and Process Control for Microlithography XVII, (2 June 2003); https://doi.org/10.1117/12.483665

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KEYWORDS

Lithography

Data modeling

Process control

Critical dimension metrology

Overlay metrology

Control systems

Semiconducting wafers

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