Enhanced quantitative analysis of resist image contrast upon line-edge roughness (LER)

Mike V. Williamson; Andrew R. Neureuther

doi:10.1117/12.485150

12 June 2003 Enhanced quantitative analysis of resist image contrast upon line- edge roughness (LER)

Mike V. Williamson, Andrew R. Neureuther

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.485150
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Correlations between LER and various types of aerial image contrast were examined for three different commercial resists. LER was more tightly correlated with the standard (max-min) definition of contrast than with the others examined, suggesting that background flare is most accountable for aerial image profile-induced LER. The relationship was nearly inverse, with LER proportional to α (contrast)^-0.85. In the latter portion of this paper, an image deblurring technique to recover more accurate LER data from SEM images was devised. This technique showed that, at times, LER can vary significantly before and after deblurring. Some initial tests to prove the validity of this LER measurement enhancement technique were performed, all with positive results.

Citation Download Citation

Mike V. Williamson and Andrew R. Neureuther "Enhanced quantitative analysis of resist image contrast upon line- edge roughness (LER)", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.485150

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available