Modifications to thermophysical behavior in ultrathin polymer films

James N. D'Amour; Curtis W. Frank; Uzodinma Okoroanyanwu

doi:10.1117/12.485111

12 June 2003 Modifications to thermophysical Behavior in ultrathin polymer films

James N. D'Amour, Curtis W. Frank, Uzodinma Okoroanyanwu

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.485111
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Understanding defects in ultrathin polymer films is of great importance to the microelectronics industry. We have taken the approach of trying to understand factors in polymer mobility by changes in glass transition temperature (Tg) and dewetting behavior. Incorporating fullerite into polystyrene (PS) films increased Tg relative to pure films. Photocrosslinkable PS showed a linear decrease in Tg with decreasing film thickness. Pyrene end-tagged polystyrene (PS-Py) and PS (both Mw = 4k) were compared on glass and gold substrates. Fluorescence data gave evidence of a higher probability of pyrene groups in proximity to the gold interface. This change in spatial distribution would be related to increases in Tg and suppression of dewetting for PS-Py films on gold.

Citation Download Citation

James N. D'Amour, Curtis W. Frank, and Uzodinma Okoroanyanwu "Modifications to thermophysical Behavior in ultrathin polymer films", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.485111

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