PEB model with cross-diffusion

Yuri Granik

doi:10.1117/12.488801

12 June 2003 PEB model with cross-diffusion

Yuri Granik

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.488801
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In multi-component chemical systems, thermodynamic fluxes linearly depend on thermodynamic forces through the matrix of Onsager’s coefficients. By applying Onsager’s relationship to the PEB diffusion of acid and other relevant chemical components, we deducted a generalization of the traditional PEB diffusion-reaction equations. This generalized system includes cross-diffusion coefficients. We have shown that certain combinations of these coefficients predict acid propagation with constant speed, even when all coefficients are constant. This serves as an alternate explanation to the conventional theory, which has to assume exponential dependency of the acid diffusion coefficient on activated site concentration. The model with cross-diffusion coefficients has additional degrees of freedom, which makes it more flexible in calibrations to the empirical data.

Citation Download Citation

Yuri Granik "PEB model with cross-diffusion", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.488801

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