Paper
2 July 2003 Technology acceleration: the suppliers' challenge
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Abstract
The technology acceleration of the ITRS Roadmap has many implications on both the semiconductor supplier community and the manufacturers. This work examines the impact of technology acceleration on the suppliers, the manufacturers of tools, materials and masks. From an Industry perspective, the development and product life cycle are examined with respect to the resources required and the return on investment. Historical information is available regarding the length of time required to develop a manufacturing worth product. Resource requirement estimates are available, so it is possible to develop an investment curve for product development. Similarly, estimates of total product sales provide the basis of the investment recovery scenario. From these evaluations, the Industry return on investment can be projected. It is possible to evaluate the impact of changes in technology on suppliers as the industry moved from 248nm to 193nm.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Walter J. Trybula "Technology acceleration: the suppliers' challenge", Proc. SPIE 5043, Cost and Performance in Integrated Circuit Creation, (2 July 2003); https://doi.org/10.1117/12.485286
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KEYWORDS
Manufacturing

Photomasks

Semiconductors

Semiconducting wafers

Birefringence

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