Cylindrical polarization symmetry for nondestructive nanocharacterization

Qiwen Zhan

doi:10.1117/12.497948

22 July 2003 Cylindrical polarization symmetry for nondestructive nanocharacterization

Qiwen Zhan

Proceedings Volume 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems; (2003) https://doi.org/10.1117/12.497948
Event: NDE for Health Monitoring and Diagnostics, 2003, San Diego, California, United States

Abstract

Recently there is an increasing interest in laser beams with radial symmetry in polarization. Due to the cylindrical symmetry in polarization, these beams have unique focusing properties, which may find wide applications in a variety of nanometer scale applications, including high-resolution metrology, high-density data storage, and multi-functional optical microtool. In this paper, simple method of generating cylindrically polarized beams is presented and their potential applications to nondestructive nano-characterization are discussed. A high resolution surface plasmon microscope and a surface plasmon enhanced apertureless near-field scanning optical microscope are proposed. An automatic scanning microellipsometer that uses the cylindrical symmetry to enhance the signal-to-noise-ratio in high-spatial-resolution ellipsometric measurement will also be presented.

Citation Download Citation

Qiwen Zhan "Cylindrical polarization symmetry for nondestructive nanocharacterization", Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, (22 July 2003); https://doi.org/10.1117/12.497948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available