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22 July 2003 Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy
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Abstract
Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. It was proved that the proposed methods are useful for evaluating the crack closure/opening on the nano-scale.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, and Tsuyoshi Mihara "Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy", Proc. SPIE 5045, Testing, Reliability, and Application of Micro- and Nano-Material Systems, (22 July 2003); https://doi.org/10.1117/12.483823
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