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22 July 2003 Design and analysis of a piezoelectric cantilever beam resonator
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This paper presents the design and analysis of a cantilever beam resonator that is driven by a piezoelectric material. In this paper, we shall look at the effects of miniaturizing the resonator. The beam is a bimorph structure with a Lead Zirconate Titanate (PZT) layer and a stainless steel substrate layer. The PZT layer is electroded in segments to form a sensor and actuator pair for feedback to drive the resonator. Key issues are the effects of design choices on the gain required to cause self-oscillation. These choices are placement and sizing of the sensor and actuator. The study is based on an analytical model of the beam. Results show that the gain required for self-oscillation is highly dependent on the actuator and sensor size and location, the mode of vibration and the overall resonator size.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Muturi G. Muriuki, William W. Clark, Qing-Ming Chen, and Qing-Ming Wang "Design and analysis of a piezoelectric cantilever beam resonator", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003);

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