Electroactive-polymer-based MEMS for aerospace and medical applications

Tian-Bing Xu; Ji Su; Qiming Zhang

doi:10.1117/12.483584

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22 July 2003 Electroactive-polymer-based MEMS for aerospace and medical applications

Tian-Bing Xu, Ji Su, Qiming Zhang

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Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.483584
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Electroactive polymers (EAP) demonstrate advantages over some traditional electroactive materials such as electro-ceramics and magneostrictive materials for electromechanical device applications due to their high strain, light weight, flexibility, and low cost. Electroactive polymer-based microelectromechanical systems (EAP-MEMS) are increasingly demanded in many aerospace and medical applications. This paper will briefly review recent progress in the developments and applications of EAP- MEMS. In the past few years, several new configurations of micromachined actuators/transducers have been developed using electroactive polymers. The performance of these micromachined EAP-based devices has been evaluated for both fluid and air conditions. The performance of EAP-MEMS has also been theoretically modeled based on material properties and device configurations. In general, the results obtained from modeling agree with the experimental measurements. Critical process issues, including patterned micro-scale electrodes, molded micro/nano electroactive polymer structures, polymer to electrode adhesion and the development of conductive polymers for electrodes will be discussed. The challenges to develop complete polymer MEMS will also be addressed.

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Tian-Bing Xu, Ji Su, and Qiming Zhang "Electroactive-polymer-based MEMS for aerospace and medical applications", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.483584

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