Boundary conditioning of capacitive MEMS devices through fabrication methods and operating environments

Packirisamy Muthukumaran; Ion G. Stiharu; Rama B. Bhat

doi:10.1117/12.514940

14 October 2003 Boundary conditioning of capacitive MEMS devices through fabrication methods and operating environments

Packirisamy Muthukumaran, Ion G. Stiharu, Rama B. Bhat

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514940
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

This paper presents and applies the concept of micro-boundary conditioning to the design synthesis of microsystems in order to quantify the influence of inherent limitations of the fabrication process and the operating conditions on both static and dynamic behavior of microsystems. The predicted results on the static and dynamic behavior of a capacitive MEMS device, fabricated through MUMPs process, under the influence of the fabrication limitation and operating environment are presented along with the test results. The comparison between the predicted and experimental results shows a good agreement.

Citation Download Citation

Packirisamy Muthukumaran, Ion G. Stiharu, and Rama B. Bhat "Boundary conditioning of capacitive MEMS devices through fabrication methods and operating environments", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514940

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