Design and analysis of micro-opto-electro-mechanical accelerometer

Jagannath Nayak; Talabuttala Srinivas; Ananth Selvarajan; D. V. K. Sastry; M. P. Unnikrishanan

doi:10.1117/12.514906

14 October 2003 Design and analysis of micro-optic-electro-mechanical accelerometer

Jagannath Nayak, Talabuttala Srinivas, Ananth Selvarajan, D. V. K. Sastry, M. P. Unnikrishanan

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514906
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

Integrated optics combined with micro-electro mechanical system (MEMS) technology offer enormous potential to improve sensitivity and performance capabilities of new sensors. In this paper, an analysis is carried out to find the feasibility and design concept of a Micro-Opto-Electro-Mechanical (MOEM) accelerometer consisting of integrated optic Mach-Zehnder interferometer, whose sensing arm is attached to a micromachined vibrating cantilever or a bridge. The analysis consists of determining changes in phase shift due to acceleration-induced refractive index and optical path length variation of MachZehender interferometer. A noise analysis is carried out to find the fundamental performance limit of different sensor configurations.

Citation Download Citation

Jagannath Nayak, Talabuttala Srinivas, Ananth Selvarajan, D. V. K. Sastry, and M. P. Unnikrishanan "Design and analysis of micro-optic-electro-mechanical accelerometer", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514906

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