Uncooled IR sensor based on MEMS technology

Deepika Khilnaney; Alok Jain; C. R. Jalwania; Vinoy K. Jain

doi:10.1117/12.514904

14 October 2003 Uncooled IR sensor based on MEMS technology

Deepika Khilnaney, Alok Jain, C. R. Jalwania, Vinoy K. Jain

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514904
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

In this paper we present a modified design based on thermal characterization of the membrane of microbolometer based infrared detectors. Theoretical calculations show that the thermal conductance should be of the order of 10^-5 W/K for 100 μm x 100 μm membrane size with the hinges of length 2 μm whereas our experimental results show that it is of the order of 10^-7 W/K. These results are explained on the basis of reduced value of the thermal conductivity of thin films compared to their bulk value. A model has been presented to explain the results.

Citation Download Citation

Deepika Khilnaney, Alok Jain, C. R. Jalwania, and Vinoy K. Jain "Uncooled IR sensor based on MEMS technology", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514904

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available