Laser adjustable actuators for high-accuracy positioning of micro components

Gerd Esser; Michael Schmidt; Manfred Dirscherl

doi:10.1117/12.540461

18 November 2003 Laser adjustable actuators for high-accuracy positioning of micro components

Gerd Esser, Michael Schmidt, Manfred Dirscherl

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.540461
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

High-precision adjustment of smallest optical and electronic components is increasingly recognized as one of the key issues facing micromachining technology. As even narrow production tolerances for all individual parts are often not sufficient to match the tightly specified positioning accuracies of the complete assembly, in situ adjustment techniques are gaining more and more attention. Together with research partners from industry and science, the BLZ is developing a contact-free, laser-based adjustment method which allows high-accuracy adjustment of components mounted on specifically designed actuators. The underlying mechanisms do not depend on thermal effects but on selective laser ablation of prestressed layers of actuator substrate. This way, slightest deformations or modifications of particular mechanical properties can be initiated. The method promises to be more accurate and less time consuming than thermally induced laser bending.

Citation Download Citation

Gerd Esser, Michael Schmidt, and Manfred Dirscherl "Laser adjustable actuators for high-accuracy positioning of micro components", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.540461

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