Paper
16 September 2003 Implementation of a micro-optical pickup using a focusing waveguide grating coupler
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Proceedings Volume 5069, Optical Data Storage 2003; (2003) https://doi.org/10.1117/12.532754
Event: Optical Data Storage 2003, 2003, Vancouver, Canada
Abstract
A micro-optical pickup has been implemented by using a focusing waveguide grating coupler. The grating coupler was designed and fabricated on a single mode BPSG (boron phosphor silica glass) waveguide layer. The coupling area was 1×1mm2 containing more than 1,500 grating lines, where the maximum and minimum grating pitch were 296nm and 811nm, respectively. The focal length and the numerical aperture of the present grating coupler were 530 μm and 0.68 with 632.8nm He-Ne red laser. The full width half maximum diameter of the focal spot was measured to be 450 nm and 510 nm in x and y direction.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mun Cheol Paek, Yeung Joon Sohn, Dongwoo Suh, Hojun Ryu, and Yongwoo Park "Implementation of a micro-optical pickup using a focusing waveguide grating coupler", Proc. SPIE 5069, Optical Data Storage 2003, (16 September 2003); https://doi.org/10.1117/12.532754
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KEYWORDS
Waveguides

Optical design

Diffraction gratings

Refractive index

Cladding

Head

Electron beam lithography

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