Microbolometer development and  production at Indigo Systems

William A. Terre; Robert Cannata; Patrick Franklin; Alfredo Gonzalez; Eric Kurth; Hiep Ly; William J. Parrish; Kevin Peters; Tommie Romeo; Robert VanYsseldyk

doi:10.1117/12.487317

10 October 2003 Microbolometer development and production at Indigo Systems

William A. Terre, Robert Cannata, Patrick Franklin, Alfredo Gonzalez, Eric Kurth, Hiep Ly, William J. Parrish, Kevin Peters, Tommie Romeo, Robert VanYsseldyk

Author Affiliations +

Proceedings Volume 5074, Infrared Technology and Applications XXIX; (2003) https://doi.org/10.1117/12.487317
Event: AeroSense 2003, 2003, Orlando, Florida, United States

Abstract

While microbolometers have been in production for several years, the number of companies producing them is quite small. Indigo Systems has entered into the development and production of VOx based microbolometers, at its Goleta facility. Through the investment of significant capital, Indigo has established a high volume production facility based on the silicon industry model. The 6-inch, cassette-to-cassette, highly automated facility is capable of yielding hundreds of thousands of die per year. Discussed in the paper will be the design and layout of the facility, performance of the devices, as well as yield, trend and throughput data.

Citation Download Citation

William A. Terre, Robert Cannata, Patrick Franklin, Alfredo Gonzalez, Eric Kurth, Hiep Ly, William J. Parrish, Kevin Peters, Tommie Romeo, and Robert VanYsseldyk "Microbolometer development and production at Indigo Systems", Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); https://doi.org/10.1117/12.487317

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available