Microbolometer development and  production at Indigo Systems

William A. Terre; Robert Cannata; Patrick Franklin; Alfredo Gonzalez; Eric Kurth; Hiep Ly; William J. Parrish; Kevin Peters; Tommie Romeo; Robert VanYsseldyk

doi:10.1117/12.487317

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10 October 2003 Microbolometer development and production at Indigo Systems

William A. Terre, Robert Cannata, Patrick Franklin, Alfredo Gonzalez, Eric Kurth, Hiep Ly, William J. Parrish, Kevin Peters, Tommie Romeo, Robert VanYsseldyk

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Proceedings Volume 5074, Infrared Technology and Applications XXIX; (2003) https://doi.org/10.1117/12.487317
Event: AeroSense 2003, 2003, Orlando, Florida, United States

Abstract

While microbolometers have been in production for several years, the number of companies producing them is quite small. Indigo Systems has entered into the development and production of VOx based microbolometers, at its Goleta facility. Through the investment of significant capital, Indigo has established a high volume production facility based on the silicon industry model. The 6-inch, cassette-to-cassette, highly automated facility is capable of yielding hundreds of thousands of die per year. Discussed in the paper will be the design and layout of the facility, performance of the devices, as well as yield, trend and throughput data.

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William A. Terre, Robert Cannata, Patrick Franklin, Alfredo Gonzalez, Eric Kurth, Hiep Ly, William J. Parrish, Kevin Peters, Tommie Romeo, and Robert VanYsseldyk "Microbolometer development and production at Indigo Systems", Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); https://doi.org/10.1117/12.487317

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