Design considerations of electrostatic forces in microaccelerometers

Jingxin Dong; Xiaochun Wu

doi:10.1117/12.488734

24 April 2003 Design considerations of electrostatic forces in microaccelerometers

Jingxin Dong, Xiaochun Wu

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.488734
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Micromechanical accelerometers are microscale sensors, whose operating principles and design theories are similar to those of conventional accelerometers. However, surface forces between mechanical structures become more important factors that affect the performance as microstructural size decreases. This paper discusses the effects of the electrostatic forces on the performance of open- and closed- loop micromechanical accelerometers, which are stiffness and damping change, and difference of the transfer function of the system.

Citation Download Citation

Jingxin Dong and Xiaochun Wu "Design considerations of electrostatic forces in microaccelerometers", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.488734

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