Dynamic characterization of passive microstructures (SiO<sub>2</sub>-Au microcantilevers) under a controlled environment

Guillaume Marinier; Eric Joubert; Mohamed Benzohra; Mohamed Ketata

doi:10.1117/12.498829

24 April 2003 Dynamic characterization of passive microstructures (SiO₂-Au microcantilevers) under controlled environment

Guillaume Marinier, Eric Joubert, Mohamed Benzohra, Mohamed Ketata

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498829
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

There currently exists many optoelectronic methods of characterization of microstructures. We present here a dynamic method which uses the principle of the optical vibrometer in order to determine the oscillatory modes of microstructures. This measurement makes it possible to go up with the mechanical properties. It is a method without contact, based on the lighting of a microstructure using a laser beam guided by a lensed tapered optical fiber which will be used. Principal evolution of this technique is its miniaturization. It allows to integrate the device within a cryostat, where we will be able to carry out measurements with a control of temperature, pressure and composition of the atmosphere.

Citation Download Citation

Guillaume Marinier, Eric Joubert, Mohamed Benzohra, and Mohamed Ketata "Dynamic characterization of passive microstructures (SiO₂-Au microcantilevers) under controlled environment", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498829

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