Fabrication of micromachined TiNi-based microgripper with compliant structure

Yongqing Fu; Hejun Du

doi:10.1117/12.498184

24 April 2003 Fabrication of micromachined TiNi-based microgripper with compliant structure

Yongqing Fu, Hejun Du

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498184
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

One of the problems faced in the development of micro-gripper is that the actuation displacement or force is too small. In this study, it is aimed to solve this problem with application of shape memory and compliant mechanisms. TiNi film based micro-gripper with compliant structure was design, simulated and fabricated. Some important issues regarding to the preparation of high performance shape memory TiNi films using sputtering methods were discussed.

Citation Download Citation

Yongqing Fu and Hejun Du "Fabrication of micromachined TiNi-based microgripper with compliant structure", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498184

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