Microfabrication using selective laser sintering micron metal powder

Jimin Chen; Xubao Wang; Tiechuan Zuo

doi:10.1117/12.501147

24 April 2003 The micro fabrication using selective laser sintering micron metal powder

Jimin Chen, Xubao Wang, Tiechuan Zuo

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.501147
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Selective laser sintering (SLS) is a process that uses a rastering laser to sinter powder particles into a computer defined shape. In order to fabricate micro part with laser sintering the laser beam spot should be focused smaller, on the other hand the size of sintered powder particles should be smaller too. Therefore Nd:YAG laser doubling frequency is used to obtain mini-focus. Based on theories of nonlinear and resonant cavity, an equipment which perform frequency doubling on YAG laser(1.06μm) by the external resonant ring cavity has been designed. With the equipment the wave length of 0.532μm green light was output. The focused laser spot of 15μm diameter was obtained with 10W power. Meanwhile the micron metal powder was used in selective laser micro sintering (SLMS). The behavior of laser sintering different metal powder was investigated. Finally the micro Chinese characters which is small as a tip of match made with laser selective micro sintering micron metal powder are shown.

Citation Download Citation

Jimin Chen, Xubao Wang, and Tiechuan Zuo "The micro fabrication using selective laser sintering micron metal powder", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.501147

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