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24 April 2003 Submillimeter mixers based on superconductive parallel junction arrays
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Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003)
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain
Observation and analysis of submillimeter-wave radiation (300GHz-3THz) in astronomy and atmospheric sciences requires increasingly performant receivers. The most sensitive receivers working in this range of electromagnetic spectrum use superconductor-insolator-superconductor (SIS) junctions. In order to increase the bandwidth and the sensitivity, we are developing a quantum-noise limited heterodyne receiver based on several parallel SIS junctions with broad (larger than 30%) fixed tuned bandwidth. These circuits can be viewed as passband filters which have been optimized by varying the spacings between junctions. We have designed such 5-junction arrays for operation in the range 480-640 GHz. Fabrication and heterodyne characterization of these devices has been done. The 1 μm2 junctions current density ranges from 4 to 13 kA/cm2, using optical lithography and Nb/Al2Nb5/Nb trilayer sputtering technology. The fabrication process and yield are presented in this paper, along with measured performances
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Faouzi Boussaha, Morvan C. Salez, Yan Delorme, Alexandre Feret, Benoit Lecomte, Karl Westerberg, and Michel Chaubet "Submillimeter mixers based on superconductive parallel junction arrays", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003);

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