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29 April 2003 Laser-induced nanoparticle formation
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Proceedings Volume 5118, Nanotechnology; (2003)
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain
General aspects, such as control of size-distribution, agglomeration/coagulation and material properties are discussed for laser-based generation of nanoparticles. Two model systems are presented, i) laser-assisted chemical vapor deposition (LCVD) of tungsten nanoparticles by H2 reduction of the excited tungsten fluoride precursor gas (WF6) and ii) laser ablation (LA) of tungsten and carbon targets at atmospheric pressure for W and C nanoparticle formation. Size-distributions of the nanoparticles are determined by electron microscopy (TEM) for the LCVD depositions and in-situ by a differential mobility analyzer and a particle counter for the LA experiments. The tungsten deposition rate is measured by X-ray fluorescence spectroscopy; materials characterization is performed by electron and X-ray diffraction techniques, Raman spectroscopy and X-ray photoelectron spectroscopy. The agglomeration/coagulation for LCVD is followed i) by the size-distribution measurements and ii) by optical emission spectroscopy of the emitted thermal (black-body) radiation of the laser-heated nanoparticles. Additionally, optical spectroscopy of the thermal radiation allows determining the temperature of the laser-heated nanoparticles. During laser ablation the size distributions and the amount of desorbed/ablated material are monitored for different ArF excimer laser parameters (fluence, rep. rate). The main and most important aspects of the presented techniques are compared and discussed.
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Peter Heszler and Lars Landstrom "Laser-induced nanoparticle formation", Proc. SPIE 5118, Nanotechnology, (29 April 2003);

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