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10 November 2003 1.3 J KrF excimer laser with 2.5% efficiency
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Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515514
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland
Abstract
The results of experimental investigations of the pumping conditions and radiation parameters of the KrF excimer laser for achieving the output radiation energy up to 1,0 J with maximal efficiency are presented. The high voltage excitation circuit on the basis of a LC-inverter type circuit including the peaking capacitors and automatic UV preionisation (API) has been developed. For the KrF laser with the active volume of 175 cm3 in He:Kr:F2 -89,8:10:0,2% gas mixture at the total pressure of 2,7 atm the overall efficiency up to 2,2% with the output radiation energy of 0,84 J was achieved. The maximum output energy of the KrF laser was of 1,0 J with the overall efficiency of 2,0%. The pulse duration (FWHM) was 24±1 ns. The addition of up to 50% of Ne as a buffer gas to He at the pressure of 2,9 atm increases the maximal output energy up to 1,3 J with efficiency of 2,5% and the maximal efficiency up to 2,9% with output energy of 0,95 J.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. N. Bagayev, Alexander M. Razhev, A. A. Zhupikov, E. S. Kargapoltsev, and V. A. Chekavinsky "1.3 J KrF excimer laser with 2.5% efficiency", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515514
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