Ablation of ceramics with ultraviolet, visible, and infrared nanosecond laser pulses

Nikolay N. Nedialkov; P. A. Atanasov; M. Sawczak; G. Sliwinski

doi:10.1117/12.515847

10 November 2003 Ablation of ceramics with ultraviolet, visible, and infrared nanosecond laser pulses

Nikolay N. Nedialkov, P. A. Atanasov, M. Sawczak, G. Sliwinski

Proceedings Volume 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2003) https://doi.org/10.1117/12.515847
Event: XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2002, Wroclow, Poland

Abstract

Laser ablation of alumina (Al₂O₃), aluminum nitride (AIN) and silicon nitride (Si₃N₄) ceramics by 6 ns Nd:YAG laser operating at wavelengths of 1064 nm, 532 nm and 355 nm is studied. For all materials the maximum ablation rate is observed at wavelength 1064 nm, and the smallest one for irradiation at 532 nm in the case of Si3N4 and AIN. The numerical model, based on the heat-transfer equation describes the temperature distribution in the material and the evaporation process. The calculated depths of the drilled holes are in agreement with experiment.

Citation Download Citation

Nikolay N. Nedialkov, P. A. Atanasov, M. Sawczak, and G. Sliwinski "Ablation of ceramics with ultraviolet, visible, and infrared nanosecond laser pulses", Proc. SPIE 5120, XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (10 November 2003); https://doi.org/10.1117/12.515847

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