Intracavity laser processing of reflecting surfaces

Vladimir P. Osipov; Vasily V. Valyavko; Andreas Feld; Boris N. Chichkov; Dmitry Jakovlev

doi:10.1117/12.515571

2 September 2003 Intracavity laser processing of reflecting surfaces

Vladimir P. Osipov, Vasily V. Valyavko, Andreas Feld, Boris N. Chichkov, Dmitry Jakovlev

Proceedings Volume 5121, Laser Processing of Advanced Materials and Laser Microtechnologies; (2003) https://doi.org/10.1117/12.515571
Event: Laser Processing of Advanced Materials and Laser Microtechnologies, 2002, Moscow, Russian Federation

Abstract

By observing the TEA CO₂ laser generation dynamics during the intracavity processing of reflecting surfaces, physical mechanisms responsible for the fabrication of periodic sub-micrometer structures are studied.

Citation Download Citation

Vladimir P. Osipov, Vasily V. Valyavko, Andreas Feld, Boris N. Chichkov, and Dmitry Jakovlev "Intracavity laser processing of reflecting surfaces", Proc. SPIE 5121, Laser Processing of Advanced Materials and Laser Microtechnologies, (2 September 2003); https://doi.org/10.1117/12.515571

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