Epitaxial MnCdHgTe layers obtained by RF sputtering in mercury plasma

Volodymyr Kavych; Maria Lozynska; Leonid Mansurov

doi:10.1117/12.517394

30 September 2003 Epitaxial MnCdHgTe layers obtained by RF sputtering in mercury plasma

Volodymyr Kavych, Maria Lozynska, Leonid Mansurov

Proceedings Volume 5126, 17th International Conference on Photoelectronics and Night Vision Devices; (2003) https://doi.org/10.1117/12.517394
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Thin MnCdHgTe epitaxial layers (4-6 μm) have been obtained by RF sputtering with localization of the mercury glow discharge in quasi-closed volume. The peculiarities of their condensation of CdTe substrates have been studied. The influence of technological parameters on the structural and electrophysical properties of MnCdHgTe layers has been investigated. The MnCdHgTe layers were chemically homogeneous in the surface of 2.5×2.5 cm² size. On the basis of the Hall measurements carried out in the magnetic field 0.1 T it has been shown that epitaxial MnCdHgTe layers obtained at the substrate temperatures in the region from 220 up to 250°C had p-type conductivity with the carrier concentration of about 10¹⁶-10¹⁷ cm^-3the anomalously high values of the hole mobility (up to 1500 cm/Vs) at 77 K.

Citation Download Citation

Volodymyr Kavych, Maria Lozynska, and Leonid Mansurov "Epitaxial MnCdHgTe layers obtained by RF sputtering in mercury plasma", Proc. SPIE 5126, 17th International Conference on Photoelectronics and Night Vision Devices, (30 September 2003); https://doi.org/10.1117/12.517394

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