Development of pellicle for F2(157-nm) excimer laser

Shigeto Shigematsu; Toshihiko Nakano; H. Shigemoto; Masahiro Kondo; Hiroaki Nakagawa; H. Sasaki; Iwao Higashikawa

doi:10.1117/12.504266

28 August 2003 Development of pellicle for F₂(157-nm) excimer laser

Shigeto Shigematsu, Toshihiko Nakano, H. Shigemoto, Masahiro Kondo, Hiroaki Nakagawa, H. Sasaki, Iwao Higashikawa

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504266
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

Because 157 nm light energy is two or more times of C-C bonding energy, the main bonding of organic materials, pellicle membrane material decomposes if it absorbs light at 157 nm. Therefore, in order to ensure the durability of the pellicle membrane, it is very important that the membrane material absorbs 157 nm light as little as possible. We researched high transmittance polymers at 157 nm by using simulation technology. In conclusion, we estimated that polymers with high transmittance at 157 nm are possible, and several companies were asked to develop it. As a result, we obtained a polymer in which 157 nm transmittance is 98.5% at 0.8 um [157 nm absorbance is 0.008 um^-1, 10 base] from Asahi Glass Co., Ltd. We carried out various 157 nm irradiation tests by using the above polymer, and obtained the result showing durability of 15 J/cm² in nitrogen + 1000 ppm oxygen environment. Furthermore, we examined the environment during F₂ Excimer Laser irradiation and found that transmittance loss of membrane and also oxygen addition quantity to irradiation environment may be improved substantially by adopting irradiation environment of Helium.

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Shigeto Shigematsu, Toshihiko Nakano, H. Shigemoto, Masahiro Kondo, Hiroaki Nakagawa, H. Sasaki, and Iwao Higashikawa "Development of pellicle for F₂(157-nm) excimer laser", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504266

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