Laser pattern generator challenges in airborne molecular contamination protection

Mats Ekberg; Per-Uno Skotte; Tomas Utterback; Swaraj Paul; Oleg P. Kishkovich; James S. Hudzik

doi:10.1117/12.504260

28 August 2003 Laser pattern generator challenges in airborne molecular contamination protection

Mats Ekberg, Per-Uno Skotte, Tomas Utterback, Swaraj Paul, Oleg P. Kishkovich, James S. Hudzik

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504260
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

The introduction of photomask laser pattern generators presents new challenges to system designers and manufacturers. One of the laser pattern generator's environmental operating challenges is Airborne Molecular Contamination (AMC), which affects both chemically amplified resists (CAResist) and laser optics. Similar challenges in CAResist protection have already been addressed in semiconductor wafer lithography with reasonable solutions and experience gained by all those involved. However, photomask and photomask equipment manufacturers have not previously had a comparable experience, and some photomask AMC issues differ from those seen in semiconductor wafer lithography. Culminating years of AMC experience, the authors discuss specific requirements of Photomask AMC. Air sampling and material of construction analysis were performed to understand these particular AMC challenges and used to develop an appropriate filtration specification for different classes of contaminates. The authors portray the importance of cooperation between tool designers and AMC experts early in the design stage to assure goal attainment to maximize both process stability and machine productivity in advanced mask making. In conclusion, the authors provide valuable recommendations to both laser tool users and other equipment manufacturers.

Citation Download Citation

Mats Ekberg, Per-Uno Skotte, Tomas Utterback, Swaraj Paul, Oleg P. Kishkovich, and James S. Hudzik "Laser pattern generator challenges in airborne molecular contamination protection", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504260

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