Intracavity beam shaping for nanoscale surface metrology

Boris Spektor; Yurij Parkhomenko; Josef Shamir

doi:10.1117/12.500549

30 May 2003 Intracavity beam shaping for nanoscale surface metrology

Boris Spektor, Yurij Parkhomenko, Josef Shamir

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.500549
Event: Optical Metrology, 2003, Munich, Germany

Abstract

Interest in beams containing phase singularities (dark beams) is evolving as applications are being realized, in particular for high-resolution microscopy and measurements. While these dark beams are usually generated with the help of diffractive elements, in this paper two new approaches for the generation of dark beams within the laser cavity are proposed and investigated. Simulations demonstrate that distributions similar to dark beams can be obtained by various laser modes.

Citation Download Citation

Boris Spektor, Yurij Parkhomenko, and Josef Shamir "Intracavity beam shaping for nanoscale surface metrology", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.500549

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