Some topics in surface and nanometrology

David J. Whitehouse

doi:10.1117/12.508362

30 May 2003 Some topics in surface and nanometrology

David J. Whitehouse

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.508362
Event: Optical Metrology, 2003, Munich, Germany

Abstract

Some problems associated with surface metrology instrumentation and theory are discussed. In particular problems in Nanometrology are highlighted with reference to Markov processes and fractal analysis. A systems approach to surface characterization is suggested.

Citation Download Citation

David J. Whitehouse "Some topics in surface and nanometrology", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.508362

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