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3 October 2003 Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques
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Increasing technological capabilities to produce active microelements (incl. microbeams, micromembranes and micromirrors) and their expanding areas of application introduce unprecedented requirements concerning their design and testing. The paper presents a concept of an optical measurement system and methodology for out-of-plane displacement testing of such active microelements. The system is based on Twyman-Green microinterferometer. It gives the possibility to combine the capabilities of time average and quasi-stroboscopic interferometry methods to find dynamic behavior of active microelements (e.g., resonance frequencies and amplitude distributions in vibration modes). For mapping the zero-order Bessel function modulating the contrast of two-beam interference fringes the four-frame technique is applied. The calibration of the contrast variation in time-averaged interferograms enables quantitative evaluation of the vibration amplitude encoded in the argument of the Bessel function. For qualitative estimation of the vibration amplitude sign a simple quasi-stroboscopic technique is proposed. In this technique, laser pulses have the same frequency as the signal activating the microelement under test. This self-synchronous system enables to visualize the shape of the tested element at maximum deflection. Exemplary results of measurements performed with active micromembranes are presented.
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Leszek A. Salbut, Krzysztof Patorski, Michal Jozwik, Jacek Marcin Kacperski, Christophe Gorecki, Alain Jacobelli, and Thierry Dean "Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques", Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003);

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