Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

Christophe Gorecki; Andrei Sabac; P. Bey; K. Gut; Alain Jacobelli; Thierry Dean

doi:10.1117/12.501463

3 October 2003 Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture

Christophe Gorecki, Andrei Sabac, P. Bey, K. Gut, Alain Jacobelli, Thierry Dean

Author Affiliations +

Proceedings Volume 5145, Microsystems Engineering: Metrology and Inspection III; (2003) https://doi.org/10.1117/12.501463
Event: Optical Metrology, 2003, Munich, Germany

Abstract

While testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane.

Citation Download Citation

Christophe Gorecki, Andrei Sabac, P. Bey, K. Gut, Alain Jacobelli, and Thierry Dean "Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture", Proc. SPIE 5145, Microsystems Engineering: Metrology and Inspection III, (3 October 2003); https://doi.org/10.1117/12.501463

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