Paper
3 November 2003 Fiber optic accelerometers: analysis of utilization of diffraction gratings
Tamara V. Tulaikova, M. Sizonenko, Hannes Bleuler, R. Wuethrich, L. Sache
Author Affiliations +
Abstract
This paper presents a signal analysis method with the purpose of detecting frequency chande and acceleration amplitude of vibrating-type accelerometer's output. The method has potential application for newly developed oscillating micro accelerometers.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tamara V. Tulaikova, M. Sizonenko, Hannes Bleuler, R. Wuethrich, and L. Sache "Fiber optic accelerometers: analysis of utilization of diffraction gratings", Proc. SPIE 5173, Current Developments in Lens Design and Optical Engineering IV, 51730G (3 November 2003); https://doi.org/10.1117/12.506285
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KEYWORDS
Diffraction gratings

Silicon

Sensors

Fiber optics

Computing systems

Fiber optics sensors

Microelectromechanical systems

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