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22 December 2003 Dynamic MEMS measuring interferometric microscope
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The wide variety of shapes, functions, and operational parameters of micro-electro-mechanical systems (MEMS) moving into production requires high flexibility for any commercial measurement instrumentation. Customers increasingly desire complete characterization of devices with both in-plane and out-of-plane motion over their full range of frequency, phase, and voltage inputs. Due to the tight tolerances on most MEMS devices, position, shape, and roughness must be measured to nanometer resolution. The parts themselves, however, can have steps up to several millimeters in height, while lateral features may range from a few microns to more than ten millimeters. Additionally, the devices must be characterized from their static state up to frequencies of one megahertz or more. These requirements pose large design challenges for both software and hardware for a system targeted to serve all of these measurement needs. While strobed systems have been used to exmaine moving devices for decades, these systems were generally quite specialized. Some could not measure static parts, while others have height or strict field-of-view limits. This paper describes the design of a general-purpose measurement system for dynamic MEMS components, and presents measurement results on a variety of MEMS devices with various features and modes of activation. Analyses including resonant frequency characterization, step response, and dynamic deformation will be presented on multiple devices.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erik Novak and Michael Schurig "Dynamic MEMS measuring interferometric microscope", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003);


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