Translator Disclaimer
Paper
22 December 2003 Lateral shearing interferometer using phase-shifting technique without moving element
Author Affiliations +
Abstract
A simple phase shifting (PS) technique without moving element in lateral shearing (LS) interferometer is presented. This method uses Murty’s simple LS interferometer with a wedge plate and adds only two identical transmission gratings. The two gratings can make three (or odd number of) equally separated identical test wavefronts. The wedge plate changes the optical path difference between the original wavefront and the sheared wavefront along the wedge direction. So three (or odd number of) interferograms having different phase shift quantity can be obtained simultaneously and 3-step PS interferometry algorithm can be applied.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jae Bong Song, Yoon Woo Lee, In Won Lee, and Jung Hoon Lee "Lateral shearing interferometer using phase-shifting technique without moving element", Proc. SPIE 5180, Optical Manufacturing and Testing V, (22 December 2003); https://doi.org/10.1117/12.505396
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
Back to Top