Etching quartz with inductively coupled plasma etching equipment

Xuming Wu; Changhe Zhou; Peng Xi; Enwen Dai; Huayi Ru; Liren Liu

doi:10.1117/12.504001

3 November 2003 Etching quartz with inductively coupled plasma etching equipment

Xuming Wu, Changhe Zhou, Peng Xi, Enwen Dai, Huayi Ru, Liren Liu

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.504001
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Inductively Coupled Plasma (ICP)can achieve high density plasma in low pressure,so it has a number of significant advantages such as improved etching rates,better profile control,improved uniformity, greatly increased selectivity and a dramatic reduction in radiation damage and contamination. In optics,quartz is an ideal optical material with transmitting spectral range from deep ultraviolet to far infrared.So we systematically studied the etching characteristics of quartz by using a Inductively Coupled Plasma (ICP)etching system.In the xperim nts,the gas was the mixture of CHF₃,O₂ and Ar,and the chamber pressure was about 10 mTorr.Th influences of gas flow rate and the power of the radio frequency on etching rate were optimized. The uniformity and repeatability of the etching technology were also studied. After residue mask material was removed by wet chemical solution, no polymer was observed on the surfaces of samples,and the surfaces of the fabricated quartz elements were smooth and clean. The optimized etching process is important for the fabrication of micro-optical lements based on quartz. Using this etching process, many gratings such as Dammann grating, rectangular groove grating, and optical disk grating can be fabricated successfully.

Citation Download Citation

Xuming Wu, Changhe Zhou, Peng Xi, Enwen Dai, Huayi Ru, and Liren Liu "Etching quartz with inductively coupled plasma etching equipment", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.504001

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