Fabrication of micropyramid prism array with coding gray-tone mask method

Qian Liu; Fuhua Gao; Feng Gao; Qingjun Peng; Yongkang Guo; Jun Yao

doi:10.1117/12.505022

3 November 2003 Fabrication of micropyramid prism array with coding gray-tone mask method

Qian Liu, Fuhua Gao, Feng Gao, Qingjun Peng, Yongkang Guo, Jun Yao

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.505022
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

An optimized coding gray-tone mask method with multi-parameters is presented in this paper. Precise calculations, which are performed on the dead area in the backward reflection of the pyramid prism, demonstrate that the fringe error caused by the coding gray-tone mask has little affect on the performance of the pyramid prisms. This not only greatly reduce the resolution requirement of the coding gray-tone mask, but also reduce the errors produced by the exposure process. A satisfying simulation result is obtained with the designed coding gray-tone mask.

Citation Download Citation

Qian Liu, Fuhua Gao, Feng Gao, Qingjun Peng, Yongkang Guo, and Jun Yao "Fabrication of micropyramid prism array with coding gray-tone mask method", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.505022

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available