Finite difference approach to optical scattering of gratings

Hanyou Chu

doi:10.1117/12.507464

4 November 2003 Finite difference approach to optical scattering of gratings

Hanyou Chu

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.507464
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Fast and efficient finite difference scheme in the vertical direction for optical scattering of gratings is presented. A second order central difference with boundary corrections or a pseudo fourth order operator splitting method is used. A stable recursion formula for the impedance matrix can be obtained. Matrix diagonalizations can be used for rectangular grating profiles when many discretization points are required. The recurrence relation is equivalent to a UL decomposition of block tridiagonal matrix. It is numerically stable compared to existing finite difference methods for gratings and many times faster than the popular rigorous coupled wave analysis method.

Citation Download Citation

Hanyou Chu "Finite difference approach to optical scattering of gratings", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.507464

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