Optimization of optical coatings for the UV/VUV range

Detlev Ristau; Stefan Guenster

doi:10.1117/12.507067

4 November 2003 Optimization of optical coatings for the UV/VUV-range

Detlev Ristau, Stefan Guenster

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.507067
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Within the research network “New Optimization Concepts for High Quality UV-Coatings” European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF₂ and LaF₃-coatings will be summarized.

Citation Download Citation

Detlev Ristau and Stefan Guenster "Optimization of optical coatings for the UV/VUV-range", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.507067

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