Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform

Yingjie Yu; Benhao Zhang; Yunfang Jiao

doi:10.1117/12.505523

4 November 2003 Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform

Yingjie Yu, Benhao Zhang, Yunfang Jiao

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.505523
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The phase-shifting algorithm via wavelength tuning based on temporal Fourier transform is according to the Fourier transform technique and the difference technique to realize the processing of the interferogram. This algorithm is applied to test some course profiles or the topography with high steps. The paper describes its main idea and presents the shortcoming of the algorithm proposed by Takeda. Then it puts forward the improved algorithml. The pape describes the realization processing and the errors of the new algorithm. Finally, it supplies the measurement result.

Citation Download Citation

Yingjie Yu, Benhao Zhang, and Yunfang Jiao "Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.505523

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available