Reliable determination of wavelength dependence of thin film refractive index

Alexander V. Tikhonravov; Michael K. Trubetskov; Tatiana V. Amotchkina; Andrei A. Tikhonravov; Detlev Ristau; Stefan Gunster

doi:10.1117/12.505554

4 November 2003 Reliable determination of wavelength dependence of thin film refractive index

Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana V. Amotchkina, Andrei A. Tikhonravov, Detlev Ristau, Stefan Gunster

Author Affiliations +

Proceedings Volume 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies; (2003) https://doi.org/10.1117/12.505554
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Depending on the choice of thin film models and measurement data used for the characterization analysis one can obtain essentially different characterization results. It is especially difficult to reliably determine refractive index wavelength dependencies in the case of low accuracy measurement data. We consider possible approaches aimed to improve a stability of refractive index determination. The ways of the verification of characterization results are also discussed. Practical examples used to illustrate the proposed approaches are connected with the most difficult case of the determination of the refractive indices of fluoride films in the VUV spectral region.

Citation Download Citation

Alexander V. Tikhonravov, Michael K. Trubetskov, Tatiana V. Amotchkina, Andrei A. Tikhonravov, Detlev Ristau, and Stefan Gunster "Reliable determination of wavelength dependence of thin film refractive index", Proc. SPIE 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies, (4 November 2003); https://doi.org/10.1117/12.505554

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