Alternative measuring modes for scanning probe instrumentation

K. Richard Koops; Kai Dirscherl

doi:10.1117/12.503069

20 November 2003 Alternative measuring modes for scanning probe instrumentation

K. Richard Koops, Kai Dirscherl

Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II; (2003) https://doi.org/10.1117/12.503069
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The need for fast and accurate inspection of small sample features is eminent considering the developments in micro and nano technology. The scanning probe microscope (SPM) offers extreme resolution and even accuracy when properly calibrated but the principle of operation result in inherently slow acquisition of the measurement data. Therefore scanning probe microscopes are rarely deployed in industrial in-line inspection and quality control where the time aspect usually is critical. We propose an alternative mode of operation that can considerably speed up SPM measurements. In this mode only the areas of interest are probe with maximum accuracy while the rest of the imaging is ignored. The measuring mode is best suited when a-priori information of the surface is available, like in an industrial production line.

Citation Download Citation

K. Richard Koops and Kai Dirscherl "Alternative measuring modes for scanning probe instrumentation", Proc. SPIE 5190, Recent Developments in Traceable Dimensional Measurements II, (20 November 2003); https://doi.org/10.1117/12.503069

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