Translator Disclaimer
10 November 2003 Point-diffraction interferometer for 3D profile measurement of rough surfaces
Author Affiliations +
We present a point-diffraction interferometer specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional two-arm interferometers. The diffraction interferometer comprises multiple two-point-diffraction sources made of a pair of single-mode optical fibers, and performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting measured phase data into a global geometrical model of multilateration. Test measurement results demonstrate that the proposed point-diffraction interferometer is well suited for the warpage inspection of microelectronics components with excessive height irregularities, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip packages.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Seung-Woo Kim and Byoung-Chang Kim "Point-diffraction interferometer for 3D profile measurement of rough surfaces", Proc. SPIE 5191, Optical Diagnostics for Fluids, Solids, and Combustion II, (10 November 2003);

Back to Top