Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation

Irina Snigireva; Vecheslav Yunkin; Sergey Kuznetsov; Maxim Grigoriev; Marina Chukalina; Leonid Shabel'nikov; Anatoly A. Snigirev; Martin Hoffmann; Edgar Voges

doi:10.1117/12.507070

23 December 2003 Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation

Irina Snigireva, Vecheslav Yunkin, Sergey Kuznetsov, Maxim Grigoriev, Marina Chukalina, Leonid Shabel'nikov, Anatoly A. Snigirev, Martin Hoffmann, Edgar Voges

Author Affiliations +

Proceedings Volume 5195, Crystals, Multilayers, and Other Synchrotron Optics; (2003) https://doi.org/10.1117/12.507070
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Focusing properties of Si planar refractive lenses including experimental tests and theoretical analysis have been studied. Computer simulations of the X-ray wave field distribution near the focal plane have been performed for different lens designs. Comparison of the experimental results with the computer simulation allows establishing the reasons for deviation of focusing from ideal performance. The deviation of the lens vertical sidewall profile was minimized by additional correction in the lens design and special efforts in optimization of etching process. Optimized lenses were manufactured, tested at the ESRF and brought out the dramatic enhancement in focusing properties.

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Irina Snigireva, Vecheslav Yunkin, Sergey Kuznetsov, Maxim Grigoriev, Marina Chukalina, Leonid Shabel'nikov, Anatoly A. Snigirev, Martin Hoffmann, and Edgar Voges "Focusing properties of silicon refractive lenses: comparison of experimental results with the computer simulation", Proc. SPIE 5195, Crystals, Multilayers, and Other Synchrotron Optics, (23 December 2003); https://doi.org/10.1117/12.507070

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