Fabrication and characteristics of nonequilibrium VLWIR detectors with HgTe/CdTe superlattice active regions

Tae-Seok Lee; Charles R. Becker; Christoph H. Grein; Sivalingam Sivananthan; Vaidya Nathan

doi:10.1117/12.506183

8 December 2003 Fabrication and characteristics of nonequilibrium VLWIR detectors with HgTe/CdTe superlattice active regions

Tae-Seok Lee, Charles R. Becker, Christoph H. Grein, Sivalingam Sivananthan, Vaidya Nathan

Author Affiliations +

Proceedings Volume 5209, Materials for Infrared Detectors III; (2003) https://doi.org/10.1117/12.506183
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

P⁺-v-N⁺ structures with HgTe/CdTe superlattice absorber regions were grown by MBE to give cut-off wavelengths in the very long wavelength infrared (14 μm and longer) at temperatures below 80 K. The superlattice period of one sample was 98.3Å according to its x-ray diffraction profile, very close the intended 98.5Å for a 48.5Å HgTe/50.Å Hg_0.05Cd_0.95Te superlattice. The cut-off wavelengths of another sample were approximately 14 and 18 μm at 77 and 40K, respectively, as determined by optical absorption and spectral response measurements. A first batch of devices annealed at 150°C or 180°C for 1 hr after the deposition of 50Å thick gold films showed relatively low R₀A values (approximately 0.3 ohm-cm²). This was interpreted to be due to the formation of a junction near the boundary of the superlattice and a high carrier concentration region of HgCdTe alloy. A second batch of devices was annealed at 120°C for 1 hr or 5 min. to decrease the gold diffusion depth. The electrical properties showed higher R₀A values (approximately 8 ohm-cm²). The detectivities of the second batch devices at 77K were in the range of 10⁸ to 10¹⁰ cmHz½/W and showed frequency dependence because the noise had frequency dependence. We observe very low knee frequencies (below 10Hz) in their noise spectra.

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Tae-Seok Lee, Charles R. Becker, Christoph H. Grein, Sivalingam Sivananthan, and Vaidya Nathan "Fabrication and characteristics of nonequilibrium VLWIR detectors with HgTe/CdTe superlattice active regions", Proc. SPIE 5209, Materials for Infrared Detectors III, (8 December 2003); https://doi.org/10.1117/12.506183

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KEYWORDS

Stereolithography

Gold

Cadmium

Mercury cadmium telluride

Diffusion

Annealing

Tellurium

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