Replication of diffractive arrays on planar light guides by soft nanolithography

Victor Weiss; Ioseph Gurwich

doi:10.1117/12.507882

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20 October 2003 Replication of diffractive arrays on planar light guides by soft nanolithography

Victor Weiss, Ioseph Gurwich

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Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.507882
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The development of replication processes of arrays of diffractive optical elements (DOEs) on planar substrates serving as optical light-guides (OLGs) by soft nano-lithography are described.The master DOE arrays were recorded by holographic interferometry in photoresist on the OLG substrate. These master OLGs carrying nanometer surface-relief grating structures were then transferred into a thermally curable Si-elastomer serving as the molding tool for the production of the replica. The replica were formed by casting UV-curable photopolymers onto a planar substrate inserted into the mold. The replication process variables were then designed and evaluated by the statistical Taguchi technique. The replica OLGs were compared to the master OLGs both in terms of surface flatness and grating fidelity. The results show that optimal processes yielded both good OLG flatness (<λ/2)and high grating fidelity (~1).

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Victor Weiss and Ioseph Gurwich "Replication of diffractive arrays on planar light guides by soft nanolithography", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.507882

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