Two-photon micromachining for functional photonic crystals

Satoshi Kawata; Hong-Bo Sun

doi:10.1117/12.508530

20 October 2003 Two-photon micromachining for functional photonic crystals

Satoshi Kawata, Hong-Bo Sun

Author Affiliations +

Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.508530
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Two-photon photopolymerization, as an important laser nanofabrication scheme, is applicable to production of micromechanical and optoelectronic devices of various dimensions. Here we report our latest progress in using this technology for fabrication of functional photonic crystals, including the achievement of high reproducibility writing by using finely quantified pixels, high-fidelity shaping through shrinkage pre-compensation, and attainment of complex three-dimensional diamond-lattice structures. These works would be essential for advanced functions of photonic crystal-based polymer optoelectronic devices.

Citation Download Citation

Satoshi Kawata and Hong-Bo Sun "Two-photon micromachining for functional photonic crystals", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.508530

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