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30 September 2003 Integrated Fabry-Perot microcavity based on surface micromachining processes
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Abstract
The development of MEMS microsystems can be increased by integration of optically active parts. Micromachining techniques allow the fabrication of monolithically integrated Fabry-Perot microcavities, avoiding hybrid assembly technique, which is a combination of etching and wafer bonding. These microcavities can be used as sensors, as modulators or as tunable optical filters. We investigated different mirror materials: silicon nitride and polysilicon and different sacrificial layers: polysilicon and phosphorus doped silicon dioxide (PSG), using LPCVD and CVD techniques. Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical constants were determined by spectrophotometric methods. Experimental data and simulations were compared.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Raluca Muller, Dimitrios Syvridis, M. Kusko, Dana Cristea, Dan Apostol, Victor S. Damian, M. Bercu, and Elena Manea "Integrated Fabry-Perot microcavity based on surface micromachining processes", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); https://doi.org/10.1117/12.520098
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